1990-04-17
1991-01-01
Hille, Rolf
357 2, 357 4, 357 59, H01L 2978
Patent
active
049822519
ABSTRACT:
A semiconductor element comprises its main part constituted of a polycrystalline silicon semiconductor layer containing 0.01 to 1 atomic % of fluorine atoms.
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Hirai Yutaka
Komatsu Toshiyuki
Nakagawa Katsumi
Nakagiri Takashi
Omata Satoshi
Canon Kabushiki Kaisha
Hille Rolf
Lake Steven
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