Integrated heater element array and fabrication method

Details Integrated heater element array and fabrication method Integrated heater element array and fabrication method

1974-08-29

1976-04-27

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Methods

29580, 156 17, 219216, 357 14, 148187, H01L 2122, H01L 21306

Patent

active

039532640

ABSTRACT:
A thermal display heater elements array for a comprising an array of semiconductor heater mesas having a larger cross-sectional area at the display surface than at the support surface. The preferred structure is in the shape of a truncated, inverted pyramid. The novel method includes forming the inverted heater elements by etching trenches in one surface of the semiconductor substrate and forming the heater mesas at the opposite surface, with the trenches defining the individual mesas.

REFERENCES:
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patent: 3466510 (1969-09-01), Maute
patent: 3559283 (1971-02-01), Kravitz
patent: 3574008 (1971-04-01), Rice
patent: 3632970 (1972-01-01), Walkow
patent: 3689357 (1972-09-01), Jordan
patent: 3728179 (1973-04-01), Davidson et al.
patent: 3844858 (1974-10-01), Bean
patent: 3892033 (1975-07-01), Kooi
patent: 3911559 (1975-10-01), Bean et al.

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