Four bar resonating force transducer

Details Four bar resonating force transducer Four bar resonating force transducer

1992-11-18

1994-11-22

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

7386259, 310321, H01L 4108

Patent

active

053672178

ABSTRACT:
A force sensing element is formed with four vibrating beams having substantially the same width and length. The four beams are spaced apart and disposed parallel to one another and are connected at opposite ends by end portions. With such a configuration, the outer beams move in phase with each other but 180.degree. out of phase with the inner beams. As such, the linear and angular reaction forces at the end portions are effectively cancelled. One advantage of such a configuration is its relative insensitivity to manufacturing process variations. By utilizing four beams which are nearly identical in width, variation in fabrication tolerance has virtually an equal effect on beam mass such that the dynamic balance of the force sensing element is maintained to a high degree of accuracy. Various drive methodologies for the force sensing element are disclosed as well as force sensing elements with integrally-formed isolator systems.

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