Piezoelectric crystalline films and method of preparing the same

Details Piezoelectric crystalline films and method of preparing the same Piezoelectric crystalline films and method of preparing the same

Filed on

1978-03-15

Date issued

1979-04-24

Examiner

Cooper, Jack

Patent Class

Stock material or miscellaneous articles

SubClass

Composite

SubSubClass

Of quartz or glass

Other Related Categories

204192SP, 252 629, 427100, 428469, 428539, C23C 1300, C04B 3500

Type

Patent

Status

active

Patent number

041513240

Description

ABSTRACT:
Piezoelectric crystalline films on substrate, which consist essentially of a crystalline zinc oxide film with a c-axis perpendicular to a substrate surface, containing 0.01 to 20.0 atomic percent of at least one element selected from the group consisting of iron, chromium, cobalt and nickel.

REFERENCES:
patent: 3766041 (1973-10-01), Wasa et al.
patent: 3988232 (1976-10-01), Wasa et al.
Matsuoka et al., "Chem. Abstracts", vol. 83, 1975, 211890s.
Takayasuo et al., "Chem. Abstracts", vol. 85, 1978, 137565u.
Kaufmann et al., "Chem. Abstracts", vol. 78, 1973, 90534q.
Sasaki et al., "Chem. Abstracts", vol. 77, 1972, 156911y.
Dybwad, "Chem. Abstracts", vol. 76, 1972, 51535e.
Carlson, "Chem. Abstracts", vol. 61, 3845g.

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