Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1989-12-06
1991-08-06
Powell, William A.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
156643, 156644, 156647, 156656, 1566591, 156667, 310364, 310365, 428137, H01L 4108, H01L 21306, B44C 122, C03C 1500
Patent
active
050380680
ABSTRACT:
A thin film pattern and a method of fabricating the thin film pattern available for an ultrasonic transducer are disclosed. That is, an oriented thin film made of a material different from the material of a substrate is formed on the substrate, a mask having a predetermined pattern is formed on the thin film, and anisotropic etching is carried out for the thin film in accordance with the predetermined pattern of the mask, by using an etchant for selectively etching a predetermined crystallographic plane parallel to the surface of the thin film, to form the predetermined pattern in the thin film, thereby obtaining a thin film pattern.
REFERENCES:
patent: 3983515 (1976-09-01), Mitchell et al.
patent: 4106975 (1978-08-01), Berkenblit et al.
patent: 4354898 (1982-10-01), Coldren et al.
patent: 4675074 (1987-06-01), Wada et al.
patent: 4692653 (1987-09-01), Kushida et al.
Polla et al., "Monolithic Integrated Zinc-Oxide on Silicon Pyroelectric Anemometer", IEEE, 1983, IEDM 83, pp. 639-642.
Ito Yukio
Kanda Hiroshi
Kushida Keiko
Sugawara Kazuhiro
Takeuchi Hiroshi
Hitachi Construction Machinery Co. Ltd.
Powell William A.
LandOfFree
Thin film pattern and method of forming the same does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thin film pattern and method of forming the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film pattern and method of forming the same will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1989439