Encoder incorporating a displaceable diffraction grating

Details Encoder incorporating a displaceable diffraction grating Encoder incorporating a displaceable diffraction grating

1990-02-26

1991-08-06

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250237G, 356356, G01D 534

Patent

active

050380320

ABSTRACT:
An encoder in which a light beam emitted from a semiconductor laser or the like is applied to a diffraction grating from a predetermined direction which is not contained in a reference plane defined by direction of relative movement of the diffraction grating and a direction normal to the diffraction grating. A diffracted light created from the diffraction grating by the application of the light beam by the light applying means is reflected by re-entering means and the reflected light is caused to re-enter the diffraction grating at substantially the same position as the position at which the diffracted light is created. At this time, an interference light formed by the other re-diffracted lights than O-order light created from the diffraction grating substantially in the same direction as the predetermined direction by the re-entrance of the diffracted light by the re-entering means is detected, and the information of the relative displacement of the light beam and the diffraction grating is obtained from a variation in the intensity of the interference light.

REFERENCES:
patent: 4629886 (1986-12-01), Akiyama et al.
patent: 4676645 (1987-06-01), Taniguchi et al.
patent: 4829342 (1989-05-01), Nishimura
patent: 4868385 (1989-09-01), Nishimura
patent: 4912320 (1990-03-01), Ishii et al.
patent: 4930895 (1990-06-01), Nishimura et al.
patent: 4933673 (1990-06-01), Ishizuka et al.

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