X-ray imaging system and solid state detector therefor

Details X-ray imaging system and solid state detector therefor X-ray imaging system and solid state detector therefor

1995-01-09

1995-11-07

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

250366, 25037009, G01T 120, G01T 124

Patent

active

054649846

ABSTRACT:
An x-ray detector includes a scintillator, a sensor array, processing circuits, and a ceramic layer. The ceramic layer overlays the processing circuits. The pixel architecture of the detector utilizes a technique similar to a CCD array to shift data from the array. The detector preferably utilizes 4-side abuttable sensor arrays having imbedded shift registers and bond pads superimposed over the pixel array in the upper metallization layers of the sensor. An alternative embodiment incorporates a silicon-on-insulator substrate to produce a monolithic large area substrate and a contiguous uninterrupted pixel array over the entire imaging surface.

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