Integrated silicon accelerometer with cross-axis compensation

Details Integrated silicon accelerometer with cross-axis compensation Integrated silicon accelerometer with cross-axis compensation

1983-10-28

1984-12-18

Gill, James J.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73514, 338 46, G01P 1512

Patent

active

044884451

ABSTRACT:
An accelerometer comprising a sheet of silicon configured as an inertia plate separate from a support plate except at a pair of flexure sites spaced along an axis, each flexure site including a pair of flexures mutually offset so that upon acceleration in a direction perpendicular to the inertia plate the flexures partake of compound bending, and stress responsive resistors at said flexures positioned so that upon compound bending the resistors change resistance in the opposite sense.

REFERENCES:
patent: 4071838 (1978-01-01), Block

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