Projection aligner

Details Projection aligner Projection aligner

1992-11-10

1994-05-24

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355125, 355 71, G03B 2768

Patent

active

053153499

ABSTRACT:
A projection aligner includes a light source for emitting light, a mask including a focusing pattern and a condensing lens for condensing the light on the mask. Light-intercepting members and light-transmitting portions are alternatingly arranged in the focusing pattern. The projecting aligner includes a projecting lens for condensing the light on a surface of a wafer and a sensor for measuring the amount of the light transmitted through the focusing pattern after the light has passed through the focusing pattern on the mask and been reflected from the surface of the wafer.

REFERENCES:
patent: 5008702 (1991-04-01), Tanaka et al.
patent: 5117254 (1992-05-01), Kawashima et al.

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