Touch sensor unit of prober for testing electric circuit and ele

Details Touch sensor unit of prober for testing electric circuit and ele Touch sensor unit of prober for testing electric circuit and ele

1991-08-06

1994-05-24

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, G01R 3102, G01R 1073

Patent

active

053152379

ABSTRACT:
A touch sensing unit has an ac signal generator for supplying an ac signal to a semiconductor chip of a semiconductor wafer or a test probe needle, and a touch sensor for sensing formation of an ac signal loop passing an ac signal of the signal generator when the test probe needle and the IC chip are touched with each other by being relatively approached to each other.

REFERENCES:
patent: 1553814 (1925-09-01), Hansen
patent: 3446065 (1969-05-01), Wiesler et al.
patent: 4158171 (1979-06-01), Abbe et al.
patent: 4195259 (1980-03-01), Reid et al.
patent: 4342957 (1982-08-01), Russell
patent: 5019771 (1991-05-01), Yang et al.

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