Metrology instrument for measuring vertical profiles of integrat

Details Metrology instrument for measuring vertical profiles of integrat Metrology instrument for measuring vertical profiles of integrat

1977-09-09

1978-08-01

Myracle, Jerry W.

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528

Patent

active

041035429

ABSTRACT:
A surface profile measuring instrument, which has a stylus supported on a counterbalanced scanner arm, in turn supported in a gimbal mounting having two axes, one of which is adjustable by a servo. A connected electronics package provides axis compensation for levelling through the servo, as well as zero adjustment of a display device and discrimination against small, unwanted slops. Stylus motion is translated into an analog signal by a linear position differential transformer. To achieve slope discrimination, the analog signal is differentiated and compared in a comparator to a reference for rejection of signals corresponding to small slopes. The signal is then integrated and displayed, with reference to a selected zero of a display device.

REFERENCES:
patent: 3501949 (1970-03-01), Reason et al.
patent: 3720818 (1973-03-01), Spragg et al.
patent: 3903735 (1975-09-01), Wilson

Affiliated with

Also associated with

Rating

Metrology instrument for measuring vertical profiles of integrat does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Metrology instrument for measuring vertical profiles of integrat, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Metrology instrument for measuring vertical profiles of integrat will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1974783