Resist compositions

Details Resist compositions Resist compositions

1992-05-28

1994-05-24

Schofer, Joseph L.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Compositions to be polymerized by wave energy wherein said...

525194, 525227, 526326, C08J 328, C08L 3306, C08F 800, C08F12010

Patent

active

053149319

ABSTRACT:
A resist based on a living polymer is provided. Living anionic polymerization of p-alkoxycarbonylstyrene monomers results in polymers having a molecular weight distribution (Mw/Mn) of from 1 to 1.4.

REFERENCES:
patent: 4705836 (1987-11-01), Ohtsuka et al.
Patent Abstracts of Japan, vol. 14, No. 100, JP-A-1 308 412 (1989).

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