Physical vapor deposition of diamond-like carbon films

Details Physical vapor deposition of diamond-like carbon films Physical vapor deposition of diamond-like carbon films

1994-10-12

1997-02-25

King, Roy V.

Stock material or miscellaneous articles

Self-sustaining carbon mass or layer with impregnant or...

427596, 427249, 427122, B05D 306

Patent

active

056057598

ABSTRACT:
A process for forming diamond like films of carbon on substrates at room temperature using physical vapour deposition. A source of carbon is physically ablated in the vicintity of a substrate to deposit on the substrate all forms of carbon. A physical discrimination process is applied continuously to remove graphite grains while leaving the aliphatic diamond form intact. The source of carbon is typically a high purity carbon rod. The substrate is typically metal or glass placed within about 60 centimeters where laser pulse energy of 50 millijoules peak power is used. Physical ablation is carried out by ion beam, arc or laser ablation. The resulting carbon plume impinges on the substrate and is thermally quenched. Physical discrimination between carbon forms is by using a laser having a wavelength which is absorbed by graphitic forms but which passes through the aliphatic forms without absorption thereby allowing thermal quenching of the diamond like aliphatic forms. Laser power is adjusted such that the optical removal rate of graphitic forms exceeds the arrival rate. Two laser beams are utilized either by two lasers or by one by suitable optical imaging. Multiple physical configurations exist to use either one or two lasers.

REFERENCES:
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patent: 5098737 (1992-03-01), Collins et al.
Sato et al. Jpn. J. Appl. Phys. vol. 26, No. 9, Sep. 1987 pp. L1487-1488.

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