Fishing – trapping – and vermin destroying
Patent
1994-08-23
1996-11-26
Fourson, George
Fishing, trapping, and vermin destroying
437247, 437248, 437925, 29 2501, 4272481, C23C 1600, C23C 1404
Patent
active
055785328
ABSTRACT:
A process comprising a platen having a substrate contact supporting a substrate during the deposition of tungsten, metal nitrides, other metals, and silicides in a chemical vapor deposition reactor. A deposition control gas composed of a suitable inert gas such as argon or a mixture of inert and reactant gases such as argon and hydrogen is introduced through a restrictive opening into an ambient in the reactor. An exclusion guard is positioned adjacent to the substrate contact and has an extension extending over a frontside peripheral region of the substrate. Deposition control gas is introduced through an opening beneath the exclusion guard extension and exits through a restrictive opening between the exclusion guard extension and a substrate frontside peripheral region. The restrictive opening provides a uniform deposition control gas flow at a pressure greater than reactor ambient pressure and process gas pressure impinging on the frontside of the substrate. Deposition control gas flows uniformly through the restrictive opening across the entire substrate frontside peripheral region, thereby preventing deposition on the substrate edge and backside.
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Benzing Jeffrey C.
Broadbent Eliot K.
Burkhart Christopher W.
Chin Barry L.
van de Ven Everhardus P.
Fourson George
Graybill David E.
Novellus Systems Inc.
Steuber David E.
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