Method of forming a metal conductor and diffusion layer

Details Method of forming a metal conductor and diffusion layer Method of forming a metal conductor and diffusion layer

1995-03-20

1997-02-25

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Pretreatment of substrate or post-treatment of coated substrate

2041921, 427124, 4271261, 427404, 427405, 4274197, 427576, 427585, H05H 100

Patent

active

056057245

ABSTRACT:
A method for minimizing reaction between metal conductors and other metals to minimize change in sheet resistance of the conductors upon heat treatment which includes providing a substrate. The substrate is preferably one of a dielectric, a metal or a semiconductor. A metallic diffusion barrier layer, preferably one of TiN, TiW or TiWN and preferably having a thickness of from about 10 nanometers to about 100 nanometers, is deposited on the substrate, preferably by one of sputtering, electron beam evaporation or chemical vapor deposition. The exposed surface of the metallic diffusion barrier layer is treated with a plasma, preferably an oxygen plasma, a nitrous oxide plasma or a plasma of an oxygen-containing species. An electrical conductor, preferably one of aluminum, aluminum-metal alloys, copper or copper-metal alloys and preferably having a thickness of from about 100 nanometers to about 1200 nanometers, is then deposited on the plasma-treated surface of the metallic diffusion barrier layer. The layers can be formed as one of a blanket or continuous films over the substrate. The conductor can then be patterned.

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