Atomic mass measurement system

Details Atomic mass measurement system Atomic mass measurement system

1983-02-24

1985-04-30

Smith, Alfred E.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250299, 250397, G01N 2300

Patent

active

045146373

ABSTRACT:
An apparatus and method for measuring the atomic mass of ion species selected by the analyzing magnet (14) of an ion implanter (10). A signal proportional to the magnetic field of the analyzing magnet is obtained by means of a rotating coil (36), and this signal is used to calculate the atomic mass by means of the equation: Atomic Mass=KB.sup.2 /V where B is the magnetic field, V is the ion beam energy at the analyzing magnet, and K is a proportionality constant. The rotating coil (36) is driven by a synchronous motor (38) powered by A.C. line voltage, and the output voltage is converted to a frequency signal proportional to the magnetic field and the line frequency. The frequency signal is counted over a time corresponding to the period of the line frequency to cancel out the line frequency dependence of the frequency signal. In accordance with one embodiment of the invention, a microprocessor is utilized to evaluate the B and V signals and to calculate the atomic mass.

REFERENCES:
patent: 2964627 (1960-12-01), Wild
patent: 3342991 (1967-09-01), Kronenberger
patent: 3397358 (1968-08-01), Allenden et al.
patent: 4256963 (1981-03-01), Takahashi et al.
patent: 4320340 (1982-03-01), Lichtenberg

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