Method for forming a capacitor having recessed lateral reaction

Details Method for forming a capacitor having recessed lateral reaction Method for forming a capacitor having recessed lateral reaction

1994-10-24

1995-11-07

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 60, 437919, 437192, H01L 2170, H01L 2700

Patent

active

054647860

ABSTRACT:
A capacitor apparatus includes, a) a substrate having a node; b) an inner capacitor plate in ohmic electrical connection with the substrate node; c) an outer capacitor plate; d) a capacitor dielectric layer interposed between inner and outer capacitor plates; e) an electrically conductive reaction barrier layer interposed between the substrate node and the inner capacitor plate, the reaction barrier layer having outer lateral edges which are recessed beneath the inner capacitor plate; and f) oxidation barrier blocks being received over the recessed outer lateral edges beneath the inner capacitor plate. Methods of forming such a capacitor are also disclosed.

REFERENCES:
patent: 5381302 (1995-01-01), Sandhu et al.
patent: 5392189 (1995-02-01), Fazan et al.

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