Single-side fabrication process for forming inkjet monolithic pr

Details Single-side fabrication process for forming inkjet monolithic pr Single-side fabrication process for forming inkjet monolithic pr

1999-08-19

2000-10-24

Le, N.

Communications: radio wave antennas

Antennas

Balanced doublet - centerfed

347 65, B41J 205

Patent

active

061374431

ABSTRACT:
A monolithic inkjet printhead is formed using single-side fabrication processes. Printing elements and feed channels are formed by processes working from a top of the die. During formation of the printing elements filler material is applied to the feed channel. Such material is later removed by an anisotropic etch. Such etchant works from the top surface and a side edge of the substrate. The single-side fabrication process is distinguished from fabrication processes that work from a bottom of a die to form the feed channel and fill channels and work from a top of the die to form printing elements.

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