Surface acoustic wave device containing an interdigital electrod

Details Surface acoustic wave device containing an interdigital electrod Surface acoustic wave device containing an interdigital electrod

1999-05-03

2000-10-24

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310360, H01L 4108

Patent

active

061372072

ABSTRACT:
The present invention provides a small yet wide-passband surface acoustic wave device that is excellent in selectivity, i.e., temperature characteristics. The surface acoustic wave device contains an interdigital electrode on the surface of a substrate made up of a langasite single crystal having the formula, La.sub.3 Ga.sub.5 SiO.sub.14, and belonging to a point group 32. When the cut angle of the substrate cut out of the langasite single crystal and the direction of propagation of a surface acoustic wave on the substrate are represented in terms of Euler's angles (.phi., .theta., and .psi.), .phi., 74 and .psi. are found within areas represented by .phi.=-5 to 5 , .theta.=136 to 146-, and .psi.=21 to 30, respectively. The relationship between the normalized thickness h/.lambda. (%) where the thickness, h, of the interdigital electrode is normalized with the wavelength .lambda. of a surface acoustic wave and the above .psi. (degree) indicating the direction of propagation of the surface acoustic wave is given by

REFERENCES:
patent: 4672255 (1987-06-01), Suzuki et al.
patent: 4902926 (1990-02-01), Engel et al.
patent: 5821673 (1998-10-01), Pisarevsky et al.
patent: 5917265 (1999-06-01), Naumenko et al.

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