Surface acoustic wave module with thin film for wave transmissio

Details Surface acoustic wave module with thin film for wave transmissio Surface acoustic wave module with thin film for wave transmissio

1997-02-11

1998-05-26

Pascal, Robert

Wave transmission lines and networks

Coupling networks

Electromechanical filter

310313A, H03H 925

Patent

active

057572500

ABSTRACT:
A surface acoustic module is stable, and its operation frequencies can be varied with high precision. A method of manufacturing the surface acoustic module prevents the module's electrodes from being broken during separation of a sheet of modules into individual components. The surface acoustic module includes electrodes for transmitting and receiving a surface acoustic wave, a surface acoustic wave transmitting substrate, a high resistance thin film, and a thin film for differentiating the transmission velocity of a surface acoustic wave at the high resistance thin film from that at the substrate. The method includes the steps of forming a metallic film on a sheet of the surface acoustic wave transmitting substrate, of forming the electrodes on the metallic film, and of irradiating light or the like to the metallic film so as to increase the film's resistivity.

REFERENCES:
patent: 3766616 (1973-10-01), Staudte
patent: 4672254 (1987-06-01), Dolat et al.
patent: 4933588 (1990-06-01), Greer
patent: 5298333 (1994-03-01), Maixner et al.
patent: 5343107 (1994-08-01), Shikata et al.
CRC Handbook of Chemistry and Physics; David R. Lide, Ph.D., editor; 71.sup.st Edition, 1990; CRC Press, Inc.; pp. 1-10, 1990
Greer, et al., "Applications of Laser-Trimming For All Quartz Package, Surface Acoustic Wave Devices", 1989 Ultrasonics Symposium, Oct. 1989, Montreal, pp. 179-184.

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