Photodiode having enhanced long wavelength response

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Details

357 13, 357 55, 357 58, H01L 2714, H01L 2912

Patent

active

042777933

ABSTRACT:
The light entry surface or back surface of an avalanche or p-i-n photodiode is contoured in a regular array of indentations which are hemispherical or almost hemispherical in shape. Light incident on the photodiode undergoes multiple interactions with the contoured surface, thus reducing the entry surface reflectivity and increasing the optical path length in the photodiode, and thereby enhancing its long wavelength response.

REFERENCES:
patent: 4011016 (1977-03-01), Layne
patent: 4046594 (1977-09-01), Tarui
patent: 4072541 (1978-02-01), Meulenberg, Jr.
patent: 4135950 (1979-01-01), Rittner

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