Method of making a spacer based antifuse structure for low capac

Details Method of making a spacer based antifuse structure for low capac Method of making a spacer based antifuse structure for low capac

1995-05-23

1998-05-26

Bowers, Jr., Charles L.

Fishing, trapping, and vermin destroying

437195, 437922, 257530, H01L 2170, H01L 2700

Patent

active

057563675

ABSTRACT:
The present antifuse includes a base having a first electrode thereon which defines a top surface and a side surface. Antifuse material is disposed on the first electrode on at least a portion of the top surface and at least a portion of the side surface, with a second electrode on the antifuse material. Due to this configuration, defect problems in etching oxide as part of the antifuse structure are avoided, and meanwhile capacitance of the device is very low.

REFERENCES:
patent: 4203123 (1980-05-01), Shanks
patent: 4670970 (1987-06-01), Bajor
patent: 4748490 (1988-05-01), Hollingsworth
patent: 5100827 (1992-03-01), Lytle
patent: 5120679 (1992-06-01), Boardman et al.
patent: 5233217 (1993-08-01), Dixit et al.

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