Method of fabricating edge type field emission element

Details Method of fabricating edge type field emission element Method of fabricating edge type field emission element

1999-10-29

2000-10-24

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

H01J 902

Patent

active

061358398

ABSTRACT:
A field emission display having element including a first electrode, and a second electrode laminated to the first electrode through an insulating layer. The first electrode has an opening; the second electrode has a hole of a planar shape corresponding to that of the opening at a position matched with the opening; and the insulating layer has a through-hole continuous to the opening and the hole. An upper edge portion of the hole is formed into a cross-sectional shape having an edge angle in a range of 80 to 100.degree., and at least part of the upper edge portion of the hole is exposed in the through-hole. In this element, electrons are emitted from the second electrode through the upper edge portion of the hole exposed in the through-hole by applying a specific voltage between the first electrode and the second electrode. With this configuration, a distance between the gate electrode and a field emission portion of the cathode electrode can be accurately controlled with a simple structure. To enhance an emission efficiency of electrons, a second gate electrode may be provided on the lower side of the cathode electrode through an insulating layer.

REFERENCES:
patent: 5079476 (1992-01-01), Kane
patent: 5136764 (1992-08-01), Vasquez
patent: 5214347 (1993-05-01), Gray
patent: 5266155 (1993-11-01), Gray
patent: 5430347 (1995-07-01), Kane et al.
patent: 5463269 (1995-10-01), Zimmerman
patent: 5562516 (1996-10-01), Spindt et al.

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