Etching apparatus for accurately making small holes in thick mat

Details Etching apparatus for accurately making small holes in thick mat Etching apparatus for accurately making small holes in thick mat

1975-09-29

1977-03-22

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156640, 156650, C23F 102

Patent

active

040134989

ABSTRACT:
A sheet of metallic material having a thickness T is covered on one side by an etchant resist and on the opposite side by an etchant resist and a removable shield. Etching is first performed on the side with only the etchant resist layer. Next, the shield is removed and the material is etched from both sides to produce an opening having a minimum dimension less than the thickness T of the material.

REFERENCES:
patent: 2052962 (1936-09-01), Booe
patent: 3197324 (1965-07-01), Brooks
patent: 3431637 (1969-03-01), Caracciolo
patent: 3679500 (1972-07-01), Kubo et al.

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