Ink jet printhead with channels formed in silicon with a (110) s

Details Ink jet printhead with channels formed in silicon with a (110) s Ink jet printhead with channels formed in silicon with a (110) s

1996-07-15

1999-02-09

Hartary, Joseph

Incremental printing of symbolic information

Ink jet

Ejector mechanism

216 27, B41J 205, B41J 216

Patent

active

058701230

ABSTRACT:
In an ink-jet printhead, the individual channels for ejecting ink onto a print medium are orientation dependently etched along the (111) planes perpendicular to the (110) surface orientation of a single crystal silicon wafer. The silicon wafer is bonded on a glass substrate to act as both a support and an etch stop in the etching process. The orientation of the channels within the silicon layer facilitates channels which are rectangular in cross section.

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