Pressure sensor and temperature sensor

Details Pressure sensor and temperature sensor Pressure sensor and temperature sensor

1995-05-11

1996-03-19

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

73723, 73754, G01L 700

Patent

active

054995353

ABSTRACT:
A force sensor comprises a substrate having a movable unit which is displaceable in response to one of an applied force and acceleration; an electron emission unit having a cathode for emitting electrons in accordance with an applied potential; an electron absorption unit having an anode for capturing electrons emitted from the cathode, the electron emission unit and the electron absorption unit being formed on a surface of the substrate; and a control unit for, on the basis of the displacement of the movable unit, controlling the electron capturing efficiency of the anode with respect to electrons emitted from the cathode.

REFERENCES:
patent: 5079958 (1992-01-01), Takase et al.
patent: 5163328 (1992-11-01), Holland et al.
patent: 5176557 (1993-01-01), Obunuki et al.
patent: 5265470 (1993-11-01), Kaiser et al.
patent: 5277067 (1994-01-01), Holland et al.
patent: 5301554 (1994-04-01), Kane et al.
Physical Properties of thin-film field emission cathodes with molybdenum cones, C. A. Spindt, et al., Sanford Research Institute, Menlo Park, CA Journal of Applied Physics, vol. 47, No. 12, pp. 5248-5263, Dec. 1976.
Technical Report, pp. 62-65, Monthly Journal, Semiconductor World 1992.3.

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