Thermal-type flow sensor

Details Thermal-type flow sensor Thermal-type flow sensor

1998-06-25

2000-10-24

Oen, William

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

061349607

ABSTRACT:
A thermal-type flow sensor capable of generating a monotonously increasing output over a time period of transition from a reverse flow to a forward flow with a simplified structure while exhibiting high sensitivity in the measurement of flow rate in the forward direction. The flow sensor includes a plurality of heat generating portions implemented by upstream heat-sensitive resistor (4) and downstream heat-sensitive resistor (5) within a passage (19) as viewed in a direction in which fluid flows through the passage (19), for thereby measuring a flow rate or a flowing speed of the fluid on the basis of heat transfer phenomenon taking place between the heat generating portions and the fluid. The flow sensor includes a heating current control means (30, 31, 32) for controlling heating currents flowing through the heat-sensitive resistors (4, 5) so that temperatures of the plurality of heat generating portions increase by predetermined values relative to the temperature of the fluid, a means (34) for determining difference between heating currents flowing through the upstream heat generating portion and the downstream heat generating portion, and means (35 to 37) for detecting the flowing speed or the flow rate of the fluid on the basis of the difference between the heating currents.

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