Micromachined integrated opto-flow gas/liquid sensor

Details Micromachined integrated opto-flow gas/liquid sensor Micromachined integrated opto-flow gas/liquid sensor

1997-04-30

1999-02-09

Larkin, Daniel S.

Measuring and testing

Liquid analysis or analysis of the suspension of solids in a...

73 2331, 73 2402, 73 3101, 73 3102, 73 3103, 73 3104, 73 3105, 73 6179, 73 6453, 25033912, 25033913, 2503411, G01N 2135, G01N 2137, G01N 2117, G01N 2103

Patent

active

058697497

ABSTRACT:
A micromachined integrated opto-fluidic or opto-acoustic sensor having a rapidly intensity-varying or pulsing light source, an interference filter, a gas cavity, which may or may not be an optical and/or acoustic resonator tuned to a particular wavelength of light, or sound frequency, into which the detected gas can diffuse into via a filter, and a fluidic or pressure sensor to detect the heating and cooling, and the resulting expansion and contraction of the gas due to the absorption of light at the particular wavelength by the specific gas being detected. The presence of other gases is inferred from the detected gas.

REFERENCES:
patent: 3659452 (1972-05-01), Atwood et al.
patent: 4958076 (1990-09-01), Bonne et al.
patent: 5444249 (1995-08-01), Wong
patent: 5600148 (1997-02-01), Cole et al.
patent: 5747808 (1998-05-01), Wong

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