Coating processes – Coating by vapor – gas – or smoke
Patent
1993-12-21
1996-09-03
Beck, Shrive
Coating processes
Coating by vapor, gas, or smoke
427250, 4272551, 118715, C23C 1600
Patent
active
055521819
ABSTRACT:
A method of supplying, in a gaseous phase, a material which is in a viscous liquid phase at normal temperature. The viscous liquid material is provided in a bubbler and the pressure of the vessel is maintained below atmospheric pressure. A carrier gas is supplied through a nozzle opening in the liquid material inside the vessel. The carrier gas is temporarily dissolved in the liquid and then released to form fine bubbles into which the liquid material is vaporized, so that the vapor of the material is supplied together with the carrier gas.
REFERENCES:
patent: 4235829 (1980-11-01), Partus
patent: 4310474 (1982-01-01), Iyengar
patent: 4436674 (1984-03-01), McMenamin
patent: 4517220 (1985-05-01), Rose
patent: 4582480 (1986-04-01), Lynch et al.
patent: 4671097 (1987-06-01), Kurki et al.
patent: 4734514 (1988-03-01), Melas et al.
patent: 4783343 (1988-11-01), Sato
patent: 4911101 (1990-03-01), Ballingall, III et al.
patent: 4919304 (1990-04-01), Markowicz
patent: 5130459 (1992-07-01), Shinzawa
patent: 5147688 (1992-09-01), Melas
patent: 5151305 (1992-09-01), Matsumoto et al.
R. Bhat et al., "The Growth And Characterization of AlGaAs Using Dimethyl Aluminum Hydride", Journal of Crystal Growth, vol. 77, 1986, pp. 7-10.
Gazicki et al., "Precise measurement of flow rates of vaporized tetraethylgermanium carried by an inert gas", J. Vacuum Science and Technology, vol. A 10(1), Jan./Feb. 1992, pp. 51-57.
Kumar et al., "The Formation of Bubbles and Drops", Advances in Chemical Engineering, edited by Drew et al., Academic Press, 1970, pp. 255-257, 289-305.
Kondoh Eiichi
Mitomo Toru
Ohta Tomohiro
Yamamoto Hiroshi
Beck Shrive
Kawasaki Steel Corporation
Talbot Brian K.
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