Apparatus for recharging of silicon granules in a czochralski si

Details Apparatus for recharging of silicon granules in a czochralski si Apparatus for recharging of silicon granules in a czochralski si

1997-08-07

1999-02-09

Garrett-Hiteshew, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

With means for measuring, testing, or sensing

117 18, 117202, 117214, C30B 3500

Patent

active

058688358

ABSTRACT:
A recharger system including a feeder and a feed conduit recharge polycrystalline silicon granules into a crucible after a run or operation of growing a single crystal silicon rod by the Czochralski method, thereby to prepare for a next run of crystal growing. The amount of holdup or backed-up supply of the silicon granules in the feed conduit is detected by a sensor provided on the feed conduit. A smooth and high-rate feed of the silicon granules is ensured by controlling the feed rate of the silicon granules from the feeder to the feed conduit and/or a descending velocity of the crucible by signals generated in the sensor as a function of the amount of the holdup or backed-up supply in the feed conduit.

REFERENCES:
patent: 5492078 (1996-02-01), Alterkruger et al.

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