Coherent light generators – Particular active media – Semiconductor
Patent
1996-09-19
1997-09-23
Bovernick, Rodney B.
Coherent light generators
Particular active media
Semiconductor
372 49, 372 99, H01S 319
Patent
active
056712430
ABSTRACT:
A surface-emitting laser system includes a laser that emits a vertically divergent beam generally parallel to the substrate on which it is formed, and a turning mirror in the path of the beam that extends up from the substrate to a level well above the laser height. The extended mirror area reflects a greater portion of the beam than prior planar designs, increasing the output efficiency and providing a smoother beam pattern. One fabrication method employs a masking and ion beam milling technique that uses an accumulation of redeposited material to form the additional mirror area, with a thick mask layer that is later removed guiding the redeposition. An alternate fabrication method involves epitaxial growth of an additional layer of material above the conventional laser epilayers, with the additional layer subsequently removed from the laser region but retained in the mirror region.
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Bovernick Rodney B.
Denson-Low W. K.
Duraiswamy V. D.
Hughes Aircraft Company
Sanghavi Hemang
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