Method and apparatus for detecting position of a mark

Details Method and apparatus for detecting position of a mark Method and apparatus for detecting position of a mark

1993-10-19

1995-02-21

Mancuso, Joseph

Image analysis

Histogram processing

For setting a threshold

382 14, 395 61, G06K 900

Patent

active

053923618

ABSTRACT:
A mark position detecting method and apparatus, suitably usable in a semiconductor device manufacturing exposure apparatus, called a stepper, prints images of a pattern of a reticle upon different shot areas on a semiconductor wafer, and aligns the reticle and the wafer. In this method, fuzzy reasoning is made by using, for example, a membership function which empirically represents the relationship between a mark signal and an alignment result. By using a conclusion of the fuzzy reasoning, the position of the mark is detected. Thus, the alignment accuracy can be improved significantly.

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