Scanning microscope, scanning width detecting device, and magnif

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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250234, 359386, H01J 314

Patent

active

052181952

ABSTRACT:
A single processing device samples a serial output of a photodetector for detecting a light beam radiated out of a sample and generates a digital image signal, which corresponds to each main scanning line of a light beam irradiated by an optical system onto the sample. Pixel clock pulses are fed into the signal processing device, the period of the pulses being modulated so as to compensate for fluctuations in a speed, at which the optical system is moved by a movement mechanism with respect to a sample supporting member. A timing signal that determines the timing, with which the sampling process is begun, is generated. A grid pattern constituted of light reflecting or blocking members arrayed in the direction, along which the optical system is moved reciprocally with respect to the sample supporting member, is secured to the sample supporting member or the optical system. A light projector is associated with the optical system or the sample supporting member and irradiates a light beam to the grid pattern. A light receiver detects the light beam reflected by the grid pattern or having passed through the grid pattern. A signal generated by the light receiver is sampled in accordance with the pixel clock pulses, and a digital displacement signal is thereby generated. The phase of a drive signal fed into the movement mechanism is shifted with respect to the phase of the timing signal in accordance with the digital displacement signal.

REFERENCES:
patent: 5043570 (1991-08-01), Takabayashi
patent: 5065008 (1991-11-01), Hakamata et al.
patent: 5081350 (1992-01-01), Iwasaki et al.
patent: 5132526 (1992-07-01), Iwasaki
patent: 5162648 (1992-11-01), Iwasaki

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