Method of depositing a highly conductive, highly transmissive fi

Details Method of depositing a highly conductive, highly transmissive fi Method of depositing a highly conductive, highly transmissive fi

1982-12-09

1986-08-12

Lawrence, Evan K.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 40, B05D 306

Patent

active

046055657

ABSTRACT:
A method of and apparatus for depositing metallic oxide coatings that are highly electrically transmissive and highly electrically conductive onto a substrate. An r.f. signal is employed to develop an ionized plasma of metal and oxygen atoms, the plasma being adapted for deposition onto a large area substrate which preferably includes semiconductor layers thereon. The method and apparatus are particularly adapted for the improved deposition of transmissive and conductive coatings which include low melting point metals onto the surface of plastic, glass or metallic substrates. The deposition may be accomplished in either a continuous or batch process mode.

REFERENCES:
patent: 4170662 (1979-10-01), Weiss et al.
patent: 4336277 (1982-06-01), Bunshah et al.
patent: 4342631 (1982-08-01), White et al.

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