Method for producing photomasks

Details Method for producing photomasks Method for producing photomasks

1991-12-12

1993-06-08

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430198, 427123, 3461351, 378 35, 428457, G03F 900

Patent

active

052178293

ABSTRACT:
A novel photomask structure and method of producing photomasks using a non-contacting spark-discharge recording apparatus. The recording constructions of the present invention comprise a conductive layer, a layer transparent to the radiation that will be used to expose the target photosensitive material and, optionally, a coating layer deposited over the metal layer.

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