Ion microbeam apparatus

Details Ion microbeam apparatus Ion microbeam apparatus

1985-05-13

1987-12-01

Fields, Carolyn E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, 2504922, H01J 3704, H01J 3710

Patent

active

047106328

ABSTRACT:
The invention is concerned with a power supply for the lens for fine adjustment among the beam-focusing lenses in an ion microbeam apparatus, and is concerned with the control thereof. In this ion microbeam apparatus, the power supply is provided for the lens for fine adjustment in addition to the power supply for the lens for rough adjustment. The power supply is served with a potential that so controls the beam as to have an optimum diameter, responsive to the signals from the ion beam detector and from the beam deflector means.

REFERENCES:
patent: 3547074 (1970-12-01), Hirschfield
patent: 4085330 (1978-04-01), Wolfe
patent: 4358338 (1982-11-01), Downey et al.
patent: 4503329 (1985-03-01), Yomaguchi et al.
patent: 4556798 (1985-12-01), McKenna et al.
Patent Abstracts of Japan, unexamined applications, E section, vol. 8, No. 25, Feb. 2, 1984.

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