Coherent light generators – Short wavelength laser
Patent
1987-08-07
1989-09-26
Sikes, William L.
Coherent light generators
Short wavelength laser
372 99, 372103, 378145, 378161, H01S 308
Patent
active
048706485
ABSTRACT:
An x-ray beamsplitter which splits an x-ray beam into two coherent parts by reflecting and transmitting some fraction of an incident beam has applications for x-ray interferometry, x-ray holography, x-ray beam manipulation, and x-ray laser cavity output couplers. The beamsplitter is formed of a wavelength selective multilayer thin film supported by a very thin x-ray transparent membrane. The beamsplitter resonantly transmits and reflects x-rays through thin film interference effects. A thin film is formed of 5-50 pairs of alternate Mo/Si layers with a period of 20-250 A. The support membrane is 10-200 nm of silicon nitride or boron nitride. The multilayer/support membrane structure is formed across a window in a substrate by first forming the structure on a solid substrate and then forming a window in the substrate to leave a free-standing structure over the window.
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Attwood et al.; "Current Developments in High Resolution X-ray Measurements"; Lawrence Livermore Laboratory UCRL-87540 (1982).
Ceglio et al.; "Multilayer Structures for X-ray Laser Cavities"; SPIE, vol. 563; 1985; pp. 360-366.
Barbee, Jr. Troy W.
Ceglio Natale M.
Hawryluk Andrew M.
Stearns Daniel S.
Carnahan L. E.
Hightower Judson R.
Sartorio Henry P.
Sikes William L.
The United States Department of Energy
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