Method of manufacturing a field-emission type switching device

Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly

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445 50, 313309, 313351, H01J 130, H01J 912

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active

052174018

ABSTRACT:
A field-emission type switching device includes a substrate formed with a recess having a straight edge and serrated edge opposite to the straight edge. A gate electrode is formed at the bottom of the recess. An emitter electrode is provided over the substrate and formed with a serrated edge which is slightly off alignment with the serrate edge of the recess so as to provide an emitter overhanging portion overhanging the recess. Similarly, a collector electrode is provided over the substrate means and formed with a straight edge which is slightly off alignment with the straight edge of the recess so as to provide a collector overhanging portion overhanging the recess. The emitter and collector electrodes are disposed in one plate and the gate electrode is disposed in another plane below the one plane.

REFERENCES:
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patent: 4578614 (1986-03-01), Gray et al.
patent: 4827177 (1989-05-01), Lee et al.
patent: 4855636 (1989-08-01), Busta et al.
patent: 4904895 (1990-02-01), Tsukamoto et al.
patent: 5030921 (1991-07-01), Kane
"The Electronics of the 21st Century", Vacuum Microelectronics, Henry F. Gray, The Naval Research Laboratory, Washington, D.C., Mar. 24, 1989, pp. 1-6.

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