Method for enhancement of semiconductor device contact pads

Details Method for enhancement of semiconductor device contact pads Method for enhancement of semiconductor device contact pads

1991-10-10

1995-02-21

Maples, John S.

Fishing, trapping, and vermin destroying

437173, 437195, 437229, 437923, 437947, H01L 21268, H01L 21441, H01L 21311

Patent

active

053915160

ABSTRACT:
Semiconductor device contact pads are enhanced by forming a metal plate over at least a portion of the contact pad. "Enhancement" includes repair such as by bridging a reinforcing pad area over probe damage, general reinforcement or enlargement of a contact pad, and placement of a protective buffer pad over a contact pad. These methods are applicable to any semiconductor device with contact pads on a surface thereof, such as entire wafers, individual dice, and multi-chip High Density Interconnect (HDI) modules. The pad enhancement plate is formed by applying a planarizing dielectric layer over the entire device (if not already formed in the initial stages of HDI processing), and an enhancement access via is then formed to expose a portion of the contact pad to be enhanced. The entire device is metallized, and metal not over the exposed portion of the contact pad is subsequently removed. Localized heating of the metal plate can be achieved by a laser to effectuate a selective pseudo-weld or produce sintering for a low resistance ohmic contact.

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