Method for the determination of points on a specimen carrying a

Details Method for the determination of points on a specimen carrying a Method for the determination of points on a specimen carrying a

1986-03-10

1987-08-25

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

G01R 3126

Patent

active

046895558

ABSTRACT:
A method and apparatus for determination of specific points on a specimen carrying a signal having a specific signal frequency by use of a scanning microscope. A detector provides a secondary electrical signal corresponding to respective particular scan points. An output of the detector connects to first and second evaluation circuits which each output a signal based on and representative of the specific signal frequency. The first evaluation circuit has a band-width substantially narrower than the second evaluation circuit. An output signal of the second evaluation circuit determines when to switch a scanning generator of the scanning microscope from a first scan rate to a second slower scan rate. The output signal of the first evaluation circuit is employed for evaluation relative to the specific points carrying the specific signal frequency.

REFERENCES:
patent: 4169229 (1979-09-01), Feuerbaum
patent: 4223220 (1980-09-01), Feuerbaum
patent: 4277679 (1981-07-01), Feuerbaum
Scanning Electron Microscopy/1970, Proc. of the Third Annual S.E.M. Symp., "Time Varying Potential Difference Observations with the SEM", Gaffney, Apr. 1970, pp. 433-440.
"Scanned Electron-Beam Probe Shows Surface Acoustic Waves in Action", by Hans-Peter Feuerbaum et al., Electronics, May 19, 1983, pp. 132-136.
Proc. of Journal d'Electronique, 1983, J. P. Collin--pp. 283-299, "An Economical Alternative for Stroboscopic Voltage Contrast . . . ".

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