Position adjustment device with a piezoelectric element as a loc

Details Position adjustment device with a piezoelectric element as a loc Position adjustment device with a piezoelectric element as a loc

1986-04-28

1987-08-25

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310328, H01L 4108

Patent

active

046895167

ABSTRACT:
A position adjustment device employs a holder on which a semiconductor wafer is attached. When placed on a surface plate, the wafer holder is turned upside-down, so that unlocked leg rods and the pattern transfer surface of the wafer are in direct contact with a reference surface of the plate. Piezoelectric elements are embedded in the holder as locking mechanism for the movable leg rods. In response to a variable DC voltage supplied by a voltage generating circuit, the piezoelectric elements deform to lock the rods with high accuracy.

REFERENCES:
patent: 3296467 (1967-01-01), Locher
patent: 3390559 (1968-07-01), Steutzer
patent: 4219755 (1980-08-01), O'Neill et al.
patent: 4342935 (1982-08-01), Kallmeyer et al.
patent: 4382243 (1983-05-01), Babitzka et al.
patent: 4384230 (1983-05-01), Wisner
patent: 4408832 (1983-10-01), Hartman et al.
patent: 4438363 (1984-03-01), Babitzka et al.

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