Apparatus for measuring surface roughness

Details Apparatus for measuring surface roughness Apparatus for measuring surface roughness

1993-10-12

1995-02-21

Wieder, Kenneth A.

Measuring and testing

Surface and cutting edge testing

Roughness

324 7628, G01B 528

Patent

active

053905369

ABSTRACT:
There are provided a pickup for scanning a surface of an object to be measured and for outputting an electric signal corresponding an unfiltered profile curve; and a low-pass filter for extracting low-frequency components corresponding to a waviness profile curve from the electric signal output from the pickup. The low-pass filter comprises two cascade-connected filters expressed by transfer function G(s) having adjusting coefficient .zeta. which ranges from 0.7134 to 1.1083:

REFERENCES:
patent: 3903735 (1975-09-01), Wilson
patent: 4126036 (1978-11-01), Nilan
patent: 4665739 (1987-05-01), Mizuno
DIN 4772, "Electrical Contact (Stylus) Instruments for the Measurement of Surface Roughness by the Profile Method", Nov. 1979, Germany.
DIN 4774, "Measurement of the Depth of Waviness by Means of Electrical Contact (Stylus) Instruments", Jul. 1981, Germany.
Tietze, et al., "Halbleiterschal Tungstechnik", 6th Ed., pp. 376, 377 and 390-398, Jan. 1983, Germany.

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