Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1990-06-28
1991-09-17
Berman, Jack I.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
313531, 328233, H01J 550
Patent
active
050497537
ABSTRACT:
A charged particle control apparatus provides very high voltage particle beams. One or more photocell arrays provide bias voltages for beam accelerating stages. The arrays are made from a number of microfabricated photocells connected in series to produce a voltage output that is the sum of the voltages from the individual cells. Arrays of each stage are connected in series to produce a cumulative stage voltage that is applied to an accelerating electrode made part of the stage.
These accelerating stages are disposed within a transparent vacuum chamber and are spaced from a charged particle source stage disposed near one end of the chamber. This charged particle source stage includes an emission source such as a photocathode. The photo arrays of the accelerating stages are connected in series to produce a potential that is applied to the particle source stage.
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Berman Jack I.
The United States of America as represented by the Secretary of
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