Method of forming an array of emmitter tips

Details Method of forming an array of emmitter tips Method of forming an array of emmitter tips

1999-07-15

2000-10-03

Stinson, Frankie L.

Etching a substrate: processes

Forming or treating an article whose final configuration has...

216 42, B44C 122, H01J 900

Patent

active

061268453

ABSTRACT:
A method for fabricating sharp asperities. A substrate is provided which has a mask layer disposed thereon, and a layer of micro-spheres is disposed superjacent the mask layer. The micro-spheres are for patterning the mask layer. Portions of the mask layer are selectively removed, thereby forming circular masks. The substrate is isotropically etched, thereby creating sharp asperities.

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