Multilayer ceramic coatings from silicate esters and metal oxide

Details Multilayer ceramic coatings from silicate esters and metal oxide Multilayer ceramic coatings from silicate esters and metal oxide

1987-01-02

1988-06-28

Pianalto, Bernard D.

Stock material or miscellaneous articles

Composite

Of inorganic material

427 38, 427 531, 427 541, 427 74, 427 99, 4271262, 4271264, 4272552, 4273762, 427380, 4274192, 4274197, 428702, 428704, B32B 900

Patent

active

047538562

ABSTRACT:
This invention relates to materials produced by diluting in a solvent a preceramic mixture of a partially hydrolyzed silicate ester and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 /metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.

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Gupta & Chin, Characterization of Spin-On Glass Films as a Planarizing Dielectric, 1985, 22, 349-365.
Glaser & Pantano, Effect of the H.sub.2 O/Teos Ratio Upon the Preparation & Nitridation of Silica Sol/Gel Films, 1984, Journal of Non-Crystalline Solids, 63, 209-221.

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