Stacked piezoelectric surface acoustic wave device with a boron

Details Stacked piezoelectric surface acoustic wave device with a boron Stacked piezoelectric surface acoustic wave device with a boron

1994-07-29

1995-11-07

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Electrical

29594, G01L 900, H04R 3100

Patent

active

054639018

ABSTRACT:
A layer of boron nitride which is relatively easily workable is positioned in a stacked structure in close contact with a piezoelectric member, to provide a surface acoustic wave device which can be driven in a higher frequency range. Such a surface acoustic device (10) has a substrate (1), a boron nitride film (2) formed on the substrate (1), and a pair of interdigital electrodes (3a, 3b) formed on the boron nitride film (2). The interdigital electrodes (3a, 3b) are covered with a piezoelectric film (4), which is in close contact with the boron nitride film (2).

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Thin Film Materials for Saw Devices by F. Hicknell, 1989 Ultrasonics Symposium pp. 285-289.

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