Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1991-10-02
1993-10-12
Hayes, Monroe H.
Photocopying
Projection printing and copying cameras
Step and repeat
355 72, 355 75, 355 76, G03B 2742
Patent
active
052530124
ABSTRACT:
A substrate holding apparatus for vertically holding a substrate to be exposed by radiation includes a substrate holding member for attracting a substrate by a magnetic force or vacuum and an engaging device for engaging the substrate on the substrate holding member. The engaging device is retractably supported by or fixed to the substrate holding member, and is engageable with or engages the substrate in such a manner that the engagement between the vertically held substrate and the engaging device is maintained even if the substrate holding member ceases to attract the substrate. Thus, dropping of the substrate by gravitation is prevented even if the substrate ceases to be attracted by the substrate holding member.
REFERENCES:
patent: 4662754 (1987-05-01), Mayer
patent: 4764791 (1988-08-01), Omata et al.
Chiba Yuji
Fujioka Hidehiko
Canon Kabushiki Kaisha
Hayes Monroe H.
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