Substrate holding apparatus for vertically holding a substrate i

Details Substrate holding apparatus for vertically holding a substrate i Substrate holding apparatus for vertically holding a substrate i

1991-10-02

1993-10-12

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 72, 355 75, 355 76, G03B 2742

Patent

active

052530124

ABSTRACT:
A substrate holding apparatus for vertically holding a substrate to be exposed by radiation includes a substrate holding member for attracting a substrate by a magnetic force or vacuum and an engaging device for engaging the substrate on the substrate holding member. The engaging device is retractably supported by or fixed to the substrate holding member, and is engageable with or engages the substrate in such a manner that the engagement between the vertically held substrate and the engaging device is maintained even if the substrate holding member ceases to attract the substrate. Thus, dropping of the substrate by gravitation is prevented even if the substrate ceases to be attracted by the substrate holding member.

REFERENCES:
patent: 4662754 (1987-05-01), Mayer
patent: 4764791 (1988-08-01), Omata et al.

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