Piezoelectric actuator

Details Piezoelectric actuator Piezoelectric actuator

1998-03-10

2000-02-15

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310328, H01L 4108

Patent

active

060256710

ABSTRACT:
A piezoelectric actuator has at least one monolithic piezoelement of a piezoelectric material, having a tubular form and a penetrating bore extending along a longitudinal direction surrounded by a tubular wall. An inner electrode is provided on the inside of the tubular wall of each piezoelement. Correspondingly, an outer electrode is provided on the outside of the tubular wall of each piezoelement. When an electric voltage is applied between the inner electrode and the outer electrode, an electrical field is formed that is essentially aligned perpendicularly to the longitudinal direction of the tubular piezoelement, the electrical field effecting a deformation of the piezoelement in its longitudinal direction in order to exert an actuation force in the longitudinal direction of the piezoelement.

REFERENCES:
patent: 3110825 (1963-11-01), Miller
patent: 3215078 (1965-11-01), Stec
patent: 4087715 (1978-05-01), Myer
patent: 4945235 (1990-07-01), Nishioka et al.
patent: 4958100 (1990-09-01), Crawley et al.
patent: 5198715 (1993-03-01), Elings et al.
patent: 5214342 (1993-05-01), Yang
patent: 5481152 (1996-01-01), Buschulte
Agrait, Vertical inertial piezoelectric translation device for a scanning tunneling microscope, Rev. Sci. Instrum., vol. 63, pp.263-264, Oct. 1991.

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