Linear motor, and stage apparatus and exposure apparatus using t

Details Linear motor, and stage apparatus and exposure apparatus using t Linear motor, and stage apparatus and exposure apparatus using t

1997-04-28

2000-02-15

Ramirez, Nestor

Electrical generator or motor structure

Dynamoelectric

Linear

H02K 4100

Patent

active

060256583

ABSTRACT:
In order to provide a good linear motor device which can enjoy low cost and high driving power but has small thrust ripples, in a linear motor in which permanent magnets move relative to a coil, a plurality of permanent magnets are arranged along the moving direction while rotating their polarity directions 90.degree. each in turn to generate a sine magnetic field. Each permanent magnet has a simple rectangular parallelopiped shape, and two or more coils of a polyphase coil are simultaneously energized.

REFERENCES:
patent: 4916340 (1990-04-01), Negishi
patent: 5519266 (1996-05-01), Chitayat
patent: 5723929 (1998-03-01), Niimi
patent: 5753991 (1998-05-01), Couture et al.

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