Method for controlling the sensitivity and linearity of capaciti

Details Method for controlling the sensitivity and linearity of capaciti Method for controlling the sensitivity and linearity of capaciti

1990-01-26

1991-09-17

Hall, Carl E.

Metal working

Electric condenser making

29593, 73718, 34087037, H01G 516

Patent

active

050481657

ABSTRACT:
Inherent capacitive-type nonlinearities in a capacitive displacement transducer can be eliminated or reduced by the introduction of an oppositely-sensed nonlinearity. The oppositely sensed nonlinearity is introduced by selecting a diaphragm thickness to define a stiffness such that there is an increased resistance to deflection. The increased resistance to deflection generates a nonlinearity which decreases with increasing input to offset an oppositely sensed inherent nonlinearly which increases with increasing input, thereby balancing the nonlinearities and achieving an overall linear output.

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A Miniature Electrical Pressure Gage Utilizing a Stretched Flat Diaphragm, John L. Patterson, Technical Note 2659, National Advisory Committee for Aeronautics, Apr. 1952.
"Structural Isolation of a Constrained Diaphragm", Instruments and Control Systems, R. A. Schaffzin, Apr. 1972.
"Properties of Electromechanical Device Utilizing Thin Silicon Diaphragms", S. Pennington et al., University of Wisconsin-Madison.

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